Physical Design and Mask Synthesis for Directed Self-Assembly Lithography (NanoScience and Technology)

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Synopsis
This book discusses physical design and mask synthesis of directed self-assembly lithography (DSAL). It covers the basic background of DSAL technology, physical design optimizations such as placement and redundant via insertion, and DSAL mask synthesis as well as its verification. Directed self-assembly lithography (DSAL) is a highly promising patterning solution in sub-7nm technology.
Copyright:
2018

Book Details

Book Quality:
Publisher Quality
ISBN-13:
9783319762944
Publisher:
Springer International Publishing
Date of Addition:
Copyrighted By:
Springer
Adult content:
No
Language:
English
Has Image Descriptions:
No
Categories:
Nonfiction, Science, Technology
Submitted By:
Bookshare Staff
Usage Restrictions:
This is a copyrighted book.

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