Physics of Radiofrequency Capacitive Discharge
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- Synopsis
- This book describes the physical mechanism of high-frequency (radio-frequency) capacitive discharge (RFCD) of low and medium pressure and the properties of discharge plasma in detail. The main properties and characteristics of RFCD, the features of electric breakdown in a high-frequency field are also investigated. The properties of near-electrode layers of a spatial discharge, the nature of the electric field in them, and the processes of charge transport to electrodes are explored. The work is intended for scientists engaged in gas discharge physics and low-temperature plasmas, graduate students and students of physics, physical chemistry, and relevant specialties.
- Copyright:
- 2018
Book Details
- Book Quality:
- Publisher Quality
- Book Size:
- 322 Pages
- ISBN-13:
- 9780429894220
- Related ISBNs:
- 9780429470608, 9781138600805
- Publisher:
- CRC Press
- Date of Addition:
- 04/17/20
- Copyrighted By:
- CISP
- Adult content:
- No
- Language:
- English
- Has Image Descriptions:
- No
- Categories:
- Nonfiction, Science
- Submitted By:
- Bookshare Staff
- Usage Restrictions:
- This is a copyrighted book.