Integration of Ferroelectric and Piezoelectric Thin Films: Concepts and Applications for Microsystems
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- Synopsis
- This book contains four parts. The first one is dedicated to concepts. It starts with the definitions and examples of what is piezo-pyro and ferroelectricity by considering the symmetry of the material. Thereafter, these properties are described within the framework of Thermodynamics. The second part described the way to integrate these materials in Microsystems. The third part is dedicated to characterization: composition, structure and a special focused on electrical behaviors. The last part gives a survey of state of the art applications using integrated piezo or/and ferroelectric films.
- Copyright:
- 2011
Book Details
- Book Quality:
- Publisher Quality
- ISBN-13:
- 9781118616604
- Related ISBNs:
- 9781118616635, 9781848212398
- Publisher:
- Wiley
- Date of Addition:
- 04/17/20
- Copyrighted By:
- ISTE Ltd
- Adult content:
- No
- Language:
- English
- Has Image Descriptions:
- No
- Categories:
- Nonfiction, Technology
- Submitted By:
- Bookshare Staff
- Usage Restrictions:
- This is a copyrighted book.
- Edited by:
- Emmanuel Defaÿ