Radio-Frequency Capacitive Discharges

By: and and

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Synopsis
The first publication of its kind in the field, this book describes comprehensively and systematically radio-frequency (rf) capacitive gas discharges of intermediate and low pressure and their application to gas laser excitation and to plasma processing. Text presents the physics underlying rf discharges along with techniques for obtaining such discharges, experimental methods and results, and theoretical and numerical modeling findings. Radio-Frequency Capacitive Discharges is written by well-known specialists in the field, authors of many theoretical and experimental works. They provide simple and clear discussions of complicated physical phenomena. A complete review on the state of the art is included. This interesting new book can be used as a textbook for students and postgraduates and as a comprehensive guidebook by specialists.
Copyright:
1995

Book Details

Book Quality:
Publisher Quality
ISBN-13:
9781351419956
Related ISBNs:
9780203741337, 9780367401863, 9780367401863, 9780849386442, 9780849386442
Publisher:
CRC Press
Date of Addition:
Copyrighted By:
CRC Press
Adult content:
No
Language:
English
Has Image Descriptions:
No
Categories:
Nonfiction, Science
Submitted By:
Bookshare Staff
Usage Restrictions:
This is a copyrighted book.

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