Wafer Manufacturing: Shaping of Single Crystal Silicon Wafers
By: and
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- Synopsis
- Presenting all the major stages in wafer manufacturing, from crystals to prime wafers. This book first outlines the physics, associated metrology, process modelling and quality requirements and the goes on to discuss wafer forming and wafer surface preparation techniques. The whole is rounded off with a chapter on the research and future challenges in wafer manufacturing.
- Copyright:
- 2021
Book Details
- Book Quality:
- Publisher Quality
- Book Size:
- 304 Pages
- ISBN-13:
- 9781118696231
- Related ISBNs:
- 9781118696224, 9780470061213
- Publisher:
- Wiley
- Date of Addition:
- 01/09/21
- Copyrighted By:
- Wiley
- Adult content:
- No
- Language:
- English
- Has Image Descriptions:
- No
- Categories:
- Nonfiction, Technology
- Submitted By:
- Bookshare Staff
- Usage Restrictions:
- This is a copyrighted book.