Advanced MEMS/NEMS Fabrication and Sensors (1st ed. 2022)
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- Synopsis
- This book begins by introducing new and unique fabrication, micromachining, and integration manufacturing methods for MEMS (Micro-Electro-Mechanical Systems) and NEMS (Nano-Electro-Mechanical Systems) devices, as well as novel nanomaterials for sensor fabrications. The second section focuses on novel sensors based on these emerging MEMS/NEMS fabrication methods, and their related applications in industrial, biomedical, and environmental monitoring fields, which makes up the sensing layer (or perception layer) in IoT architecture. This authoritative guide offers graduate students, postgraduates, researchers, and practicing engineers with state-of-the-art processes and cutting-edge technologies on MEMS /NEMS, micro- and nanomachining, and microsensors, addressing progress in the field and prospects for future development.Presents latest international research on MEMS/NEMS fabrication technologies and novel micro/nano sensors;Covers a broad spectrum of sensor applications;Written by leading experts in the field.
- Copyright:
- 2022
Book Details
- Book Quality:
- Publisher Quality
- ISBN-13:
- 9783030797492
- Related ISBNs:
- 9783030797485
- Publisher:
- Springer International Publishing
- Date of Addition:
- 11/15/21
- Copyrighted By:
- Springer Nature Switzerland AG
- Adult content:
- No
- Language:
- English
- Has Image Descriptions:
- No
- Categories:
- Nonfiction, Technology
- Submitted By:
- Bookshare Staff
- Usage Restrictions:
- This is a copyrighted book.
- Edited by:
- Zhuoqing Yang