Silicon Semiconductor Technology: Processing and Integration of Microelectronic Devices (1st ed. 2023)
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- Synopsis
- The book presents the basic steps and the technical implementation of individual processes for microelectronic circuit integration in silicon. Interaction and influences of e. g. oxidation, etching, doping and thermal processes for integrating CMOS- and Bipolar circuits are discussed in detail, beginning with the purification of silicon up to the encapsulated integrated circuit. It includes modern processes like atomic layer deposition and etching for nanoscale structures and compares improvements like silicide contacts, copper metallization, high-k dielectrics, and SOI and FINFET structures. All processes are presented looking from the process engineer’s view.
- Copyright:
- 2023
Book Details
- Book Quality:
- Publisher Quality
- ISBN-13:
- 9783658410414
- Related ISBNs:
- 9783658410407
- Publisher:
- Springer Fachmedien Wiesbaden
- Date of Addition:
- 08/02/23
- Copyrighted By:
- Springer Fachmedien Wiesbaden GmbH, part of Springer Nature
- Adult content:
- No
- Language:
- English
- Has Image Descriptions:
- No
- Categories:
- Nonfiction, Technology
- Submitted By:
- Bookshare Staff
- Usage Restrictions:
- This is a copyrighted book.