Silicon-Molecular Beam Epitaxy: Volume I (Electrochemical Society. Proceedings Ser.: Vol. 85-7)
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- Synopsis
- This subject is divided into two volumes. Volume I is on homoepitaxy with the necessary systems, techniques, and models for growth and dopant incorporation. Three chapters on homoepitaxy are followed by two chapters describing the different ways in which MBE may be applied to create insulator/Si stackings which may be used for three-dimensional circuits. The two remaining chapters in Volume I are devoted to device applications. The first three chapters of Volume II treat all aspects of heteroepitaxy with the exception of the epitaxial insulator/Si structures already treated in volume I.
- Copyright:
- 1988
Book Details
- Book Quality:
- Publisher Quality
- Book Size:
- 260 Pages
- ISBN-13:
- 9781351093514
- Related ISBNs:
- 9781351076616, 9781315897516
- Publisher:
- CRC Press
- Date of Addition:
- 08/27/23
- Copyrighted By:
- CRC Press
- Adult content:
- No
- Language:
- English
- Has Image Descriptions:
- No
- Categories:
- Nonfiction, Technology
- Submitted By:
- Bookshare Staff
- Usage Restrictions:
- This is a copyrighted book.