Ultra-Clean Technology Handbook: Volume 1: Ultra-Pure Water
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- Synopsis
- Evaluating the effectiveness of conventional wet processes for cleaning silicon wafers in semiconductor production, this reference reveals concrete measures to improve ultrapure water quality reviewing the structure and physical characteristics of ultrapure water molecules.
- Copyright:
- 1993
Book Details
- Book Quality:
- Publisher Quality
- Book Size:
- 944 Pages
- ISBN-13:
- 9781351406420
- Related ISBNs:
- 9780824787530, 9780367402341, 9780203734827
- Publisher:
- CRC Press
- Date of Addition:
- 12/07/23
- Copyrighted By:
- Taylor & Francis Group, LLC
- Adult content:
- No
- Language:
- English
- Has Image Descriptions:
- No
- Categories:
- Nonfiction, Science, Technology
- Submitted By:
- Bookshare Staff
- Usage Restrictions:
- This is a copyrighted book.
- Edited by:
- Tadahiro Ohmi