Tribology In Chemical-Mechanical Planarization
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- Synopsis
- Illustrating their intersecting role in manufacturing and technological development, this book examines tribological principles and their applications in CMP, including integrated circuits, basic concepts in surfaces of contacts, and common defects as well as friction, lubrication fundamentals, and the basics of wear. The book concludes its focus with mechanical aspects of CMP, pad materials, elastic modulus, and cell buckling. As the first source to integrate CMP and tribology, Tribology in Chemical-Mechanical Planarization provides applied scientists and engineers in the fields of semiconductors and microelectronics with clear foresight to the future of this technology.
- Copyright:
- 2005
Book Details
- Book Quality:
- Publisher Quality
- Book Size:
- 200 Pages
- ISBN-13:
- 9781040062197
- Related ISBNs:
- 9780367393250, 9780824725679, 9781420028393, 9780429120084
- Publisher:
- CRC Press
- Date of Addition:
- 06/21/24
- Copyrighted By:
- Taylor&Francis Group, LLC
- Adult content:
- No
- Language:
- English
- Has Image Descriptions:
- No
- Categories:
- Nonfiction, Technology
- Submitted By:
- Bookshare Staff
- Usage Restrictions:
- This is a copyrighted book.