Manufacturing Techniques for Microfabrication and Nanotechnology
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- Synopsis
- Designed for science and engineering students, this text focuses on emerging trends in processes for fabricating MEMS and NEMS devices. The book reviews different forms of lithography, subtractive material removal processes, and additive technologies. Both top-down and bottom-up fabrication processes are exhaustively covered and the merits of the d
- Copyright:
- 2011
Book Details
- Book Quality:
- Publisher Quality
- ISBN-13:
- 9781040063590
- Related ISBNs:
- 9781420055191, 9781439891803, 9781439895306, 9781466501430, 9780429112461
- Publisher:
- CRC Press
- Date of Addition:
- 11/08/24
- Copyrighted By:
- Taylor and Francis Group, LLC
- Adult content:
- No
- Language:
- English
- Has Image Descriptions:
- No
- Categories:
- Nonfiction, Technology
- Submitted By:
- Bookshare Staff
- Usage Restrictions:
- This is a copyrighted book.