MEMS: Design and Fabrication (1)
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- Synopsis
- Thoroughly revised and updated, the new edition of the best-selling MEMS Handbook is now presented as a three-volume set that offers state-of-the-art coverage of microelectromechanical systems. Through chapters contributed by top experts and pioneers in the field, MEMS: Design and Fabrication presents a comprehensive look at the materials, procedures, tools, and techniques of MEMS fabrication. New chapters in this edition examine the materials and fabrication of polymer microsystems and optical diagnostics for investigating the entrance length in microchannels. Rigorous yet accessible, this volume provides the practical knowledge needed for work in cutting-edge MEMS applications.
- Copyright:
- 2005
Book Details
- Book Quality:
- Publisher Quality
- Book Size:
- 664 Pages
- ISBN-13:
- 9781040202401
- Related ISBNs:
- 9780367391638, 9781420036565, 9780849391385, 9780429125461
- Publisher:
- CRC Press
- Date of Addition:
- 01/26/25
- Copyrighted By:
- Taylor & Francis Group, LLC
- Adult content:
- No
- Language:
- English
- Has Image Descriptions:
- No
- Categories:
- Nonfiction, Technology
- Submitted By:
- Bookshare Staff
- Usage Restrictions:
- This is a copyrighted book.
- Edited by:
- null Mohamed Gad-el-Hak