Microlithography Fundamentals in Semiconductor Devices and Fabrication Technology (1)
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- Synopsis
- "Explores the science and technology of lithographic processes and resist materials and summarizes the most recent innovations in semiconductor manufacturing. Considers future trends in lithography and resist material technology. Reviews the interaction of light, electron beams, and X-rays with resist materials."
- Copyright:
- 1998
Book Details
- Book Quality:
- Publisher Quality
- Book Size:
- 336 Pages
- ISBN-13:
- 9781351830713
- Related ISBNs:
- 9781482273762, 9780824799519, 9781351822022, 9781315214825
- Publisher:
- CRC Press
- Date of Addition:
- 02/01/25
- Copyrighted By:
- Taylor & Francis Group, LLC
- Adult content:
- No
- Language:
- English
- Has Image Descriptions:
- No
- Categories:
- Nonfiction, Technology
- Submitted By:
- Bookshare Staff
- Usage Restrictions:
- This is a copyrighted book.
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